Journal - Volume I No.1 August 2014

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  • Title

    :

    COMPARATIVE ANALYSIS OF CANTILEVER TYPE MEMS DEVICE FOR HUMIDITY MEASUREMENT

    Authors

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    L.Chitra, Dr.V.Ramakrishnan

    Keywords

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    MEMS, Cantilever Humidity Sensor, COMSOL MULTIPHYSICS.

    Issue Date

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    August-2014

    Abstract

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    This paper presents research on water content present in transformer oils. Online moisture measurements were analyzed by using different designs of MEMs humidity sensor. The measurement of humidity is of great importance in transformer oil maintenance. This is especially essential for the continuous monitoring of oil in order to have safe operation of transformer without insulation breakdown. This paper presents the simulated model of a cantilever type humidity sensor. The structure consists of a cantilever beam made up of polyimide which is the sensing element and the water molecules are formed as a spherical structure over the polyimide beam. In the structure, the expansion of the polymer in the presence of water vapors forces the cantilever to bend resulting in a change of the device stress. The stress induced in the cantilever due to the polyimide swelling is proportional to the relative humidity. The model is simulated using COMSOL Metaphysics. This finite element simulation is carried out using different structures of cantilever for better sensitivity and response time .Static analysis were performed for the polyimide cantilever and the output is taken as displacement over the cantilever.

    Page(s)

    :

    80-84

    ISSN

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    2347- 4734

    Source

    :

    Vol. 1, No.1

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